Applications of Ultrasonic and Mass Flow Meters in the Semiconductor Manufacturing Industry

Overview

The semiconductor manufacturing industry produces integrated circuits (ICs) and other semiconductor devices. It involves processes like wafer fabrication, where silicon wafers are processed to create intricate circuit patterns, and assembly and testing, where individual ICs are packaged and tested for functionality. This industry is essential for electronics manufacturing and drives innovation in various sectors, including consumer electronics, telecommunications, automotive, and healthcare.

Depending on specific features and functions, GAO Tek’s Ultrasonic and mass flow meters are sometimes referred to as the silicon chip industry, semiconductor foundry sector, semiconductor fabrication sector, microchip manufacturing industry, electronic component fabrication industry, silicon wafer fabrication sector, semiconductor device manufacturing sector, integrated circuit fabrication industry, chip fabrication sector, semiconductor production industry, IC fabrication industry, and water manufacturing industry.

Furthermore, GAO Tek’s ultrasonic and mass flow meters are further grouped into:

Handheld, High Precision, Rugged, Data Logging, Probes, and Liquid

GAO Tek’s Ultrasonic and mass flow meters have the following applications in the semiconductor manufacturing industry:

Gas Flow Measurement in CVD: GAO Tek’s ultrasonic and mass flow meters are used to precisely measure and control the flow of gases like silane (SiH4), diborane (B2H6), and trimethylaluminum (TMA) in chemical vapor deposition processes for thin film deposition.

Chemical Delivery System Monitoring: GAO’s ultrasonic and mass flow meters flow meters ensure accurate delivery of chemicals for processes like etching and cleaning, preventing over- or under-use of chemicals that can affect product quality.

Pressure Control: GAO Tek’s ultrasonic and mass flow meters help maintain consistent pressure levels in semiconductor processing equipment, ensuring stable and reliable operation of tools like ion implanters and plasma etchers.

Leak Detection: GAO’s ultrasonic and mass flow meters can detect leaks in gas and chemical lines, minimizing the risk of contamination and ensuring worker safety.

Process Gas Monitoring: GAO Tek’s ultrasonic and mass flow meters monitor the flow rates of process gases such as nitrogen, argon, and oxygen, crucial for controlling the atmosphere in various semiconductor processes.

Plasma Etching Optimization: GAO’s ultrasonic and mass flow meters accurately measure gas flow, these meters optimize plasma etching processes, ensuring uniform etching rates and precise control over feature dimensions.

Photolithography Equipment: GAO’s ultrasonic and mass flow meters measure gas flow rates in photolithography equipment, ensuring precise deposition of photoresist and other materials.

Chemical Mechanical Planarization (CMP): GAO Tek’s ultrasonic and mass flow meters ultrasonic and mass flow meters monitor and control the flow of slurry and chemicals in CMP processes, essential for achieving uniform material removal rates across wafers.

More information on ultrasonic and mass flow meters and their applications in other industries can be found on

Ultrasonic and mass flow meters

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Structural

System in the Semiconductors Manufacturing Industry Utilizing Ultrasonic and Mass Flow Meters

Here are some popular systems in the semiconductors manufacturing industry using ultrasonic and mass flow meters:

Ultrasonic Flow Meter System:

Flow Measurement and Analysis Software: Provides real-time flow measurement data analysis and monitoring for ultrasonic flow meters.

Remote Monitoring and Control Software: Enables remote monitoring and control of ultrasonic flow meters, offering easy access to data and settings.

SCADA Integration Software: Integrates ultrasonic flow meter data with SCADA systems for comprehensive process monitoring and control.

Mass Flow Meter System:

Calibration and Configuration Software: Software for calibrating and configuring mass flow meters for accurate performance.

Process Control and Automation Software: Integrates mass flow meters into industrial processes for control and automation.

Data Logging and Reporting Software: Logs data from mass flow meters and generates reports for analysis and compliance.

Combined Ultrasonic and Mass Flow Meter System:

Integration and Data Management Software: Integrates data from both ultrasonic and mass flow meters for comprehensive flow measurement.

Energy Management and Optimization Software: Manages and optimizes energy usage based on flow measurements from both types of meters.

Cloud-Based Monitoring and Analytics Software: Cloud-based software for remote monitoring and analytics of combined flow meter systems.

Manufacturing Execution System:

Siemens’ Camstar Semiconductor Suite Software: Manages manufacturing operations and quality control.

Aegis’ Factory Logix Software: Offers a paperless manufacturing environment and real-time data analytics.

Cimetrix’s Sapience Software: Provides equipment connectivity and control for improved efficiency.

Process Control System:

Rudolph Technologies’ Discover Software: Advanced process control software for optimizing manufacturing processes.

Nova’s Nova CPM Software: Offers comprehensive process control and monitoring capabilities.
Onto Innovation’s Process Sentinel Software: Provides real-time process control and analysis for semiconductor manufacturing.

GAO Tek’s targeted markets are North America, particularly the U.S. and Canada.

Complying with Government Regulations

GAO Tek’s ultrasonic and mass flow meters comply or help our customers comply with U.S. government regulations such as:  

Environmental Protection Agency (EPA)

Occupational Safety and Health Administration (OSHA)

National Institute for Occupational Safety and Health (NIOSH)

National Fire Protection Association (NFPA)

American National Standards Institute (ANSI)

National Electrical Code (NEC)

Federal Communications Commission (FCC)

Food and Drug Administration (FDA)

National Institute of Standards and Technology (NIST)

Electronic Industries Alliance (EIA)

Underwriters Laboratories (UL)

Semiconductor Equipment and Materials International (SEMI)

GAO Tek’s ultrasonic and mass flow meters comply or help our customers comply with Canadian regulations such as:

Occupational Health and Safety Act (OHSA)

Canadian Centre for Occupational Health and Safety (CCOHS)

Canadian Standards Association (CSA)

National Energy Board (NEB)

Canadian Environmental Assessment Agency (CEAA)

Transportation of Dangerous Goods Act (TDGA)

Workplace Hazardous Materials Information System (WHMIS)

Canadian Nuclear Safety Commission (CNSC)

Canadian Environmental Protection Act (CEPA)

Health Canada (HC)

Public Health Agency of Canada (PHAC)

Canadian Radio-television and Telecommunications Commission (CRTC)

Case Studies of Ultrasonic and Mass Flow Meters in the Semiconductors Manufacturing Industry

Ultrasonic and mass flow meters are sometimes called silicon chip industry, semiconductor foundry sector, semiconductor fabrication sector, microchip manufacturing industry, electronic component fabrication industry, silicon wafer fabrication sector, semiconductor device manufacturing sector, integrated circuit fabrication industry, chip fabrication sector, semiconductor production industry, IC fabrication industry, and water manufacturing industry.

Here are some practical examples of using ultrasonic and mass flow meters in the semiconductors manufacturing industry:

In the Northeast region of the U.S., semiconductor manufacturers have implemented ultrasonic and mass flow meters in various applications to improve efficiency and process control, a leading semiconductor company in the region deployed ultrasonic flow meters in their gas delivery systems to accurately measure and control the flow of process gases critical for semiconductor fabrication.

A semiconductor manufacturer in the region integrated mass flow meters into their chemical delivery systems. These meters monitor and regulate the flow of chemicals used in manufacturing processes, leading to significant cost savings and improved process reliability. Additionally, ultrasonic flow meters have been utilized in water cooling systems to measure the flow rates of cooling water.

In the Midwest region of the U.S., semiconductor manufacturers have successfully implemented ultrasonic and mass flow meters in various applications to enhance their production processes, a prominent semiconductor company in the region incorporated ultrasonic flow meters into their gas delivery systems to precisely measure and regulate the flow of process gases crucial for semiconductor fabrication.

A semiconductor facility in the Midwest region utilized ultrasonic flow meters in their gas cabinet monitoring systems to ensure the proper supply of gases to semiconductor manufacturing equipment. The accurate monitoring of gas flow rates has enhanced equipment performance and reduced downtime, resulting in improved overall production efficiency.

In the southern region of the U.S., semiconductor manufacturers have effectively utilized ultrasonic and mass flow meters to optimize their manufacturing processes. Implemented ultrasonic flow meters in their gas delivery systems to accurately measure and control the flow of process gases precision has improved product quality and consistency while reducing waste.

In a different case, a semiconductor facility in the southern region utilized ultrasonic flow meters in their gas cabinet monitoring systems to ensure the proper supply of gases to semiconductor manufacturing equipment. The accurate monitoring of gas flow rates has enhanced equipment performance and reduced downtime, resulting in improved overall production efficiency.

In the southern region of the U.S., semiconductor manufacturers have implemented ultrasonic and mass flow meters in various applications to enhance their production processes, a leading semiconductor company in the region integrated ultrasonic flow meters into their gas delivery systems to accurately measure and control the flow of process gases implementation has improved product quality and consistency while reducing waste.

In the southern region, they employed ultrasonic flow meters in their gas cabinet monitoring systems to ensure the proper supply of gases to semiconductor manufacturing equipment. The accurate monitoring of gas flow rates has enhanced equipment performance and reduced downtime, resulting in improved overall production efficiency.

In Canada, semiconductor manufacturers have implemented ultrasonic and mass flow meters in various applications to enhance their production processes, leading semiconductor company in Canada integrated ultrasonic flow meters into their gas delivery systems to accurately measure and control the flow of process gases implementation has improved product quality and consistency while reducing waste.

Canada utilized mass flow meters in their chemical delivery systems. These meters monitor and regulate the flow of chemicals used in manufacturing processes, resulting in significant cost savings and improved process reliability. Additionally, ultrasonic flow meters have been deployed in water cooling systems to measure the flow rates of cooling water, optimizing cooling processes and ensuring equipment operates efficiently.

GAO RFID Inc. RFID Hardware, a sister company of GAO Tek Inc., is ranked as one of the top 10 RFID suppliers in the world. Its RFID, BLE, and IoT products have also been widely used in the semiconductor manufacturing industry. Articles about related industries are given below:

Automotive Industry

Manufacturing Industry

Use of Ultrasonic and Mass Flow Meters with Leading Software and Cloud Services in the Semiconductors Manufacturing Industry

GAO Tek has used or has facilitated its customers to use GAO’s ultrasonic and mass flow meters with some of the leading software and cloud services in their applications. Examples of such leading software and cloud services include:

Siemens Digital Industries Software

Applied Materials

KLA Corporation

Lam Research

ASML

Tokyo Electron

Dassault Systems

Oracle

Amazon Web Services (AWS)

Microsoft Azure

Google Cloud Platform

Intel Corporation

National Instruments

Cadence Design Systems

GAO Tek’s ultrasonic and mass flow meters and their applications in other industries are listed on

Ultrasonic and mass flow meters

Other related products can be found on

Structural

Meeting Customers Demands

Large Choice of Products

In order to satisfy the diversified needs of their corporate customers, GAO Tek Inc. and its sister company GAO RFID Inc. together offer a wide choice of testing and measurement devices, network products, RFID, BLE, IoT, and drones.

Fast Delivery

To shorten the delivery to our customers, GAO has maintained a large stock of its products and is able to ship overnight within the continental U.S. and Canada from the nearest warehouse.

Local to Our Customers

We are located in both the U.S. and Canada. We travel to customers’ premises if necessary. Hence, we provide very strong local support to our customers in North America, particularly the U.S. and Canada.

Furthermore, we have built partnerships with some integrators, consulting firms, and other service providers in different cities to further strengthen our services. Here are some of the service providers in the semiconductors manufacturing industry we have worked with to serve our joint customers:

Accenture

Deloitte

IBM Global Services

Cognizant Technology Solutions

Capgemini

Infosys

Wipro

Tata Consultancy Services (TCS)

HCL Technologies

DXC Technology

Atos

NTT Data

Tech Mahindra

LTI (Larsen & Toubro Infotech)

GAO has Many Customers in the Semiconductors Manufacturing Industry

The products from both GAO Tek Inc. and GAO RFID Inc. have been widely used in the semiconductors manufacturing industry by many customers, including some leading companies. Here is more information on applications of GAO RFID Inc.’s products in the semiconductors manufacturing industry. Articles about related industries are given below:

Automotive Industry

Manufacturing Industry

Here are some of GAO’s customers in the semiconductors manufacturing industry: